MEMS implementation of axial and follower end forces
نویسندگان
چکیده
Although it is challenging to implement follower forces in macroscale laboratory experiments, they can be implemented fairly easily in MEMS devices. This paper discusses the implementation of follower and axial end forces in a beam-type MEMS resonator for the application of resonant frequency tuning. r 2005 Elsevier Ltd. All rights reserved.
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